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Plasma-Surface Interactions...
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Dry Etching for VLSI
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Plasma Etching: Fundamentals...
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Plasma Etching Processes for...
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Handbook of Plasma Processing...
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William D Westwood
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Handbook of Advanced Plasma...
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Micromachining Using...
Rolf Wuthrich,
Jana D Abou Ziki
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Photons and Low Energy...
Carol I. H. Asby (Editor),
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Plasma Etching: An...
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Niederdruckplasmen Und...
Dr. Gerhard Franz
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Intro Microlith 2ed Acspr C
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Plasma Deposition, Treatment,...
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Plasma Processing of...
P F Williams (Editor)
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Dry Etching for...
Ronald A Powell
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Applications of Plasma...
Takuo Sugano (Editor)
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Photon-Assisted Processing of...
J Dieleman
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Proceedings of the...
G S Mathad (Editor),
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