Add this copy of Proceedings of the International Symposium on Thin Film to cart. $149.95, very good condition, Sold by Mike's Library rated 5.0 out of 5 stars, ships from Plymouth, PA, UNITED STATES, published 1998 by The Electrochemical Society.
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Seller's Description:
Very Good with no dust jacket. 1566771838. Library stamps/marks/labels/pocket, otherwise light wear. Crisp hardcover.; "Held as a part of the Joint International Meeting of the Electrochemical Society, Inc. and the International Society for Electrochemistry in Paris, France, Aug. 31-Sept. 5, 1997"--P. iii. 192nd ECS Meeting. "Both fundamental and applied aspects will be emphasized, related to the following topics used in the fabrication of submicron semiconductor devices: plasma processes and reactors; photochemical (laser, UV) processes for etching, deposition, and surface cleaning; rapid thermal processing; and process diagnostics, control, and modeling related to thin film processes."; Proceedings (The Electrochemical Society); Ex-Library; Vol. 97-30; ix, 370 pages.