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Molecular Beam Epitaxy: Fundamentals and Current Status - Herman, Marian, and Sitter, Helmut
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This study describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this edition two new fields have been added: crystallization of as-grown low-dimensional ...

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Molecular Beam Epitaxy: Fundamentals and Current Status 2013, Springer, Berlin, Heidelberg

ISBN-13: 9783642800627

2nd 1996

Trade paperback

Molecular Beam Epitaxy: Fundamentals and Current Status 2012, Springer, Berlin, Heidelberg

ISBN-13: 9783642971006

Trade paperback

Molecular Beam Epitaxy: Fundamentals and Current Status 1996, Springer, Berlin, Germany

ISBN-13: 9783540605942

2nd Revised edition

Hardcover

Molecular Beam Epitaxy: Fundamentals and Current Status 1989, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783540190752

Hardcover