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Epitaxy: Physical Principles and Technical Implementation

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Epitaxy: Physical Principles and Technical Implementation - Herman, Marian A., and Richter, W., and Sitter, Helmut
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Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, ...

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Epitaxy: Physical Principles and Technical Implementation 2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783642087370

Paperback

Epitaxy: Physical Principles and Technical Implementation 2004, Springer, Berlin, Heidelberg

ISBN-13: 9783540678212

Hardcover