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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition (2nd Revised edition)

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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition - Madou, Marc J
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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications ...

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Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition 2002, CRC Press, Boca Raton, FL

ISBN-13: 9780849308260

2nd Revised edition

Hardcover