Skip to main content alibris logo

Fundamentals of Microfabrication

by

Write The First Customer Review
Fundamentals of Microfabrication - Madou, Marc J
Filter Results
Shipping
Item Condition
Seller Rating
Other Options
Change Currency

Nanotechnology and microengineering are among the top priority research areas in the United States and will continue to be so during the next decade, making Fundamentals of Microfabrication an important and timely work. Written by an internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication, this book will function as both a valuable textbook and a handy reference. Ten chapters discuss in detail topics such as lithography, pattern transfer, ...

loading
Fundamentals of Microfabrication 1997, CRC Press, Boca Raton, FL

ISBN-13: 9780849394515

Hardcover