"The Science and Engineering of Microelectronic Fabrication" provides a thorough introduction to the field of microelectronic processing. Geared toward a wide audience, it may be used for upper-level undergraduate or first year graduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, ...
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"The Science and Engineering of Microelectronic Fabrication" provides a thorough introduction to the field of microelectronic processing. Geared toward a wide audience, it may be used for upper-level undergraduate or first year graduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, non-optical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest. The new edition includes complete chapter coverage of MEMS including: Fundamentals of Mechanics, Stress in Thin Films, Mechanical to Electrical Transduction, Mechanics of Common MEMS Devices, Bulk Micromachining Etching Techniques, Bulk Micromachining Process Flow, Surface Micromachining Basics, Surface Micromachining Process Flow, MEMS Actuators, and High Aspect Ratio Microsystems Technology (HARMST).
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Add this copy of The Science and Engineering of Microelectronic to cart. $24.68, good condition, Sold by ThriftBooks-Atlanta rated 5.0 out of 5 stars, ships from Brownstown, MI, UNITED STATES, published 2001 by Oxford University Press, USA.
Add this copy of The Science and Engineering of Microelectronic to cart. $24.68, fair condition, Sold by ThriftBooks-Baltimore rated 4.0 out of 5 stars, ships from Halethorpe, MD, UNITED STATES, published 2001 by Oxford University Press, USA.
Add this copy of The Science and Engineering of Microelectronic to cart. $24.75, good condition, Sold by SurplusTextSeller rated 5.0 out of 5 stars, ships from Columbia, MO, UNITED STATES, published 2001 by Oxford University Press, USA.
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Good. Ships in a BOX from Central Missouri! May not include working access code. Will not include dust jacket. Has used sticker(s) and some writing or highlighting. UPS shipping for most packages, (Priority Mail for AK/HI/APO/PO Boxes).
Add this copy of The Science and Engineering of Microelectronic to cart. $72.50, good condition, Sold by TEXTSHUB rated 5.0 out of 5 stars, ships from Franklin Lakes, NJ, UNITED STATES, published 2001 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $72.92, good condition, Sold by Book Words rated 3.0 out of 5 stars, ships from Midland Park, NJ, UNITED STATES, published 2001 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $81.16, new condition, Sold by GridFreed rated 4.0 out of 5 stars, ships from North Las Vegas, NV, UNITED STATES, published 2001 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $90.69, new condition, Sold by lobovtobooks rated 5.0 out of 5 stars, ships from skokie, IL, UNITED STATES, published 2001 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $109.00, like new condition, Sold by Marsarbooks rated 5.0 out of 5 stars, ships from Cambridge, UNITED KINGDOM, published 2001 by Oxford University Press.
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Fine. No dust jacket, as issued. This is the 2001 second edition of this excellent up to date text. As new condition, perfect mint. A brand new copy. The Oxford series in electrical and computer engineering. Unknown printing. xiv, 603 p. : ill. ; 25 cm Includes bibliographical references and index.
Add this copy of The Science and Engineering of Microelectronic to cart. $174.49, new condition, Sold by Revaluation Books rated 4.0 out of 5 stars, ships from Exeter, DEVON, UNITED KINGDOM, published 2001 by Oxford Univ Pr.
