The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a ...
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The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
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Add this copy of The Physics of Microfabrication to cart. $20.00, very good condition, Sold by Bingo Used Books rated 4.0 out of 5 stars, ships from Vancouver, WA, UNITED STATES, published 1982 by U.S.A. : Springer.
Add this copy of The Physics of Microfabrication to cart. $23.00, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1982 by Springer.
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Add this copy of The Physics of Microfabrication to cart. $24.40, very good condition, Sold by Halcyon Books rated 4.0 out of 5 stars, ships from LONDON, LONDON, UNITED KINGDOM, published 1982 by Springer.
Add this copy of The Physics of Microfabrication to cart. $24.95, very good condition, Sold by Lexington Books rated 5.0 out of 5 stars, ships from Idaho Falls, ID, UNITED STATES, published 1982 by Springer.
Add this copy of Physics of Microfabrication to cart. $31.75, very good condition, Sold by Bingo Used Books rated 4.0 out of 5 stars, ships from Vancouver, WA, UNITED STATES, published 1982 by New York, New York, U.S.A. : Plenum Pub Corp.
Add this copy of The Physics of Microfabrication to cart. $38.24, good condition, Sold by Anybook rated 5.0 out of 5 stars, ships from Lincoln, UNITED KINGDOM, published 1983 by Plenum Press.
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This is an ex-library book and may have the usual library/used-book markings inside. This book has hardback covers. In good all round condition. Dust jacket in good condition. Please note the Image in this listing is a stock photo and may not match the covers of the actual item, 1050grams, ISBN: 0306408635.
Add this copy of The Physics of Microfabrication to cart. $56.05, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 1982 by Springer.
Add this copy of Physics of Microfabrication to cart. $57.50, very good condition, Sold by BingoBooks2 rated 4.0 out of 5 stars, ships from Vancouver, WA, UNITED STATES, published 1982 by New York, New York, U.S.A. : Plenum Pub Corp.
Add this copy of The Physics of Microfabrication to cart. $81.24, new condition, Sold by Just one more Chapter rated 3.0 out of 5 stars, ships from Miramar, FL, UNITED STATES, published 1982 by Springer.