As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, ...
Read More
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.
Read Less
Add this copy of Ccd Image Sensors in Deep-Ultraviolet (Microtechnology to cart. $106.76, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2005 by Springer.
Add this copy of Ccd Image Sensors in Deep-Ultraviolet (Microtechnology to cart. $107.31, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2005 by Springer.
Add this copy of CCD Image Sensors in Deep-Ultraviolet: Degradation to cart. $159.69, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2005 by Springer.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
New. Print on demand Sewn binding. Cloth over boards. 232 p. Contains: Unspecified, Illustrations, black & white, Tables, black & white. Microtechnology and Mems.
Add this copy of Ccd Image Sensors in Deep-Ultraviolet: Degradation to cart. $165.84, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 2005 by Springer.