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Reliability and Materials Issues of Semiconductor Optical and Electrical Devices and Materials: Volume 1195

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Reliability and Materials Issues of Semiconductor Optical and Electrical Devices and Materials: Volume 1195 - Ueda, Osamu (Editor), and Fukuda, Mitsuo (Editor), and Pearton, Stephen J. (Editor)
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Achieving high reliability is a key issue for semiconductor optical and electrical devices and is as important as device performance for commercial application. Degradation of both optical and electrical devices is strongly related to materials issues. A variety of material defects can occur during the device fabrication processes, i.e., crystal growth, impurity diffusion, ion-implantation, wet/dry etching, metallization, bonding, packaging, etc. This book focuses on the current status of reliability and degradation of ...

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Reliability and Materials Issues of Semiconductor Optical and Electrical Devices and Materials: Volume 1195 2010, Materials Research Society, New York

ISBN-13: 9781605111681

Hardcover