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Chemistry of Atomic Layer Deposition

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Chemistry of Atomic Layer Deposition - Barry, Seán Thomas
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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs ato

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Chemistry of Atomic Layer Deposition 2021, de Gruyter, Berlin/Boston

ISBN-13: 9783110712513

Trade paperback