Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod- eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, ...
Read More
Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod- eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, however, generally looked on as a last resort due to the extremely slow convergence of these methods. It is of interest, then, to examine when in microelectronics it is necessary to use Monte Carlo methods, how such methods may be improved, and what are the alternatives. This book ad- dresses three general areas of simulation which frequently arise in semicon- ductor modeling where Monte Carlo methods playa significant role. In the first chapter the basic mathematical theory of the Boltzmann equation for particle transport is presented. The following chapters are devoted to the modeling of the transport processes and the associated Monte Carlo meth- ods. Specific examples of industrial applications illustrate the effectiveness and importance of these methods. Two of these areas concern simulation of physical particles which may be assigned a time dependent position and velocity. This includes the molecules of a dilute gas used in such processing equipment as chemi- cal vapor decomposition reactors and sputtering reactors. We also consider charged particles moving within a semiconductor lattice.
Read Less
Add this copy of Transport Simulation in Microelectronics to cart. $16.00, new condition, Sold by Scholars Attic rated 5.0 out of 5 stars, ships from Lake Barrington, IL, UNITED STATES, published 1995 by Birkhauser.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
New book-No international shipping available. Sewn binding. Cloth over boards. 235 p. Respiratory Pharmacology and Pharmacotherapy, 3. Audience: General/trade.
Add this copy of Transport Simulation in Microelectronics to cart. $38.90, new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2011 by Birkhauser.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
New. Trade paperback (US). Glued binding. 240 p. Progress in Numerical Simulation for Microelectronics, 3. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Transport Simulation in Microelectronics to cart. $38.91, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2011 by Birkhauser.
Add this copy of Transport Simulation in Microelectronics (Progress in to cart. $46.35, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 1995 by Birkhauser.
Add this copy of Transport Simulation in Microelectronics (Progress in to cart. $50.49, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 1995 by Birkhauser.
Add this copy of Transport Simulation in Microelectronics Progress in to cart. $53.38, new condition, Sold by Paperbackshop rated 4.0 out of 5 stars, ships from Bensenville, IL, UNITED STATES, published 2011 by Birkhäuser.
Add this copy of Transport Simulation in Microelectronics (Progress in to cart. $61.51, like new condition, Sold by Bookmonger.Ltd rated 5.0 out of 5 stars, ships from Hillside, NJ, UNITED STATES, published 1995 by Birkhauser.
Add this copy of Transport Simulation in Microelectronics to cart. $61.80, new condition, Sold by Booksplease rated 4.0 out of 5 stars, ships from Southport, MERSEYSIDE, UNITED KINGDOM, published 2011 by Birkhauser.
