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Thin Films Technology: Practical Manual for the Laboratory Works

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Thin Films Technology: Practical Manual for the Laboratory Works - Axelevitch, Alexander
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This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It ...

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Thin Films Technology: Practical Manual for the Laboratory Works 2021, World Scientific Publishing Company

ISBN-13: 9789811246326

Hardcover