Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers. Read More

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers. Read Less

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  	This is a digital edition of this title. Rent eBook 180 Day Rental: $61.60 (Expires Dec 26, 2024) Buy eBook Lifetime Access: $77.00 Title: Soft X-Rays and Extreme Ultraviolet Radiation by David Attwood Publisher: Cambridge University Press Print ISBN: 9780521029971, 052102997X eText ISBN: 9781139636421 Edition: 2007 1st edition Format: EPUB eBook	$61.60 Rent eBook This is a digital eBook Nothing will be shipped to you Works with web browsers and the VitalSource app on all Windows, Mac, Chromebook, Kindle Fire, iOS, and Android devices Most eBooks are returnable within 14 days of purchase Questions? See our eBook FAQ