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Silicon Technologies: Ion Implantation and Thermal Treatment

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Silicon Technologies: Ion Implantation and Thermal Treatment - Baudrant, Annie (Editor)
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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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Silicon Technologies: Ion Implantation and Thermal Treatment 2011, ISTE Ltd and John Wiley & Sons Inc, London

ISBN-13: 9781848212312

Hardcover