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Silicon Sensors and Actuators: The Feynman Roadmap - Vigna, Benedetto (Editor), and Ferrari, Paolo (Editor), and Villa, Flavio Francesco (Editor)
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This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman's visionary talk "There is Plenty of ...

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Silicon Sensors and Actuators: The Feynman Roadmap 2023, Springer Nature Switzerland AG, Cham

ISBN-13: 9783030801373

Paperback

Silicon Sensors and Actuators: The Feynman Roadmap 2022, Springer, Cham

ISBN-13: 9783030801342

2022 edition

Hardcover