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Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties

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Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties - Milek, John T
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The large amount of literature on the technology of thin film silicon nitride indi- cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in ...

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Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties 2013, Springer, New York, NY

ISBN-13: 9781468461640

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