This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet ...
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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
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Add this copy of Silicon Micromachining to cart. $76.64, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2004 by Cambridge University Press.
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New. Print on demand Trade paperback (US). Contains: Line drawings, Halftones, Tables. Cambridge Studies in Semiconductor Physics and Microelectronic Engineering . 388 b/w illus. 20 tables. Intended for professional and scholarly audience.
Add this copy of Silicon Micromachining to cart. $94.83, new condition, Sold by Ria Christie Books rated 5.0 out of 5 stars, ships from Uxbridge, MIDDLESEX, UNITED KINGDOM, published 2004 by Cambridge University Press.
Add this copy of Silicon Micromachining to cart. $106.24, new condition, Sold by Booksplease rated 4.0 out of 5 stars, ships from Southport, MERSEYSIDE, UNITED KINGDOM, published 2004 by Cambridge University Press.
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New. Trade paperback (US). Contains: Line drawings, Halftones, Tables. Cambridge Studies in Semiconductor Physics and Microelectronic Engineering . 388 b/w illus. 20 tables. Intended for professional and scholarly audience.
Add this copy of Silicon Micromachining (Cambridge Studies in to cart. $126.44, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 2004 by Cambridge University Press.
Add this copy of Silicon Micromachining (Cambridge Studies in to cart. $90.97, very good condition, Sold by Pink Casa Antiques rated 5.0 out of 5 stars, ships from Frankfort, KY, UNITED STATES, published 1999 by Cambridge University Press.
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Very Good. Size: 7x1x10; hardcover with dust jacket, tight, pages clear and bright, shelf and edge wear, corners bumped, packaged in cardboard box for shipment, tracking on U.S. orders.
