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Science and Technology of Chemical Mechanical Planarization (Cmp): Volume 1157

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Science and Technology of Chemical Mechanical Planarization (Cmp): Volume 1157 - Kumar, Ashok (Editor), and Higgs III, C Fred (Editor), and Korach, Chad S (Editor)
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This book demonstrates the swift progress achieved in the field of diamond for electronic and bioelectronic applications. Predicted to become the 'ultimate semiconductor' in the early 1990s, diamond initially failed to match the impressive developments made with other wide-bandgap semiconductors. The situation is changing, with single-crystal electronic-grade diamond becoming a commercially available material. As importantly, the spectacular properties of single-point defects in diamond, as well as its superlative thermal ...

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Science and Technology of Chemical Mechanical Planarization (Cmp): Volume 1157 2010, Cambridge University Press, New York

ISBN-13: 9781605111308

Hardcover