Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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Add this copy of Rapid Thermal Processing of Semiconductors to cart. $234.84, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2013 by Springer.
Add this copy of Rapid Thermal Processing of Semiconductors to cart. $259.84, like new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2013 by Springer.
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Seller's Description:
Fine. Trade paperback (US). Glued binding. 358 p. Contains: Unspecified. Microdevices. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Rapid Thermal Processing of Semiconductors to cart. $260.09, new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2013 by Springer.
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Seller's Description:
New. Trade paperback (US). Glued binding. 358 p. Contains: Unspecified. Microdevices. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Rapid Thermal Processing of Semiconductors to cart. $85.49, very good condition, Sold by Alien Bindings rated 5.0 out of 5 stars, ships from BALTIMORE, MD, UNITED STATES, published 1997 by Springer.
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Very good. Ex-library book, otherwise VG+ condition. The covers look great. The binding is tight. The pages are clean and unmarked. Electronic delivery tracking will be issued free of charge. 380 pages. Microdevices.
