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RF Mems and Their Applications - Varadan, Vijay K, and Vinoy, K J, and Jose, K A
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Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant ...

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RF Mems and Their Applications 2002, Wiley

ISBN-13: 9780470843086

Hardcover