This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.
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This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.
Read Less
Add this copy of Precision Nanometrology: Sensors and Measuring Systems to cart. $234.84, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2014 by Springer.
Add this copy of Precision Nanometrology to cart. $291.16, new condition, Sold by Media Smart rated 4.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 2014 by Springer.
Add this copy of Precision Nanometrology: Sensors and Measuring Systems to cart. $234.84, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2010 by Springer.
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Seller's Description:
New. Print on demand Glued binding. Paper over boards. 354 p. Contains: Unspecified, Line drawings, black & white, Tables, black & white, Figures. Springer Advanced Manufacturing.
