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Nano- And Micro-Electromechanical Systems: Fundamentals of Nano- And Microengineering, Second Edition

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Nano- And Micro-Electromechanical Systems: Fundamentals of Nano- And Microengineering, Second Edition - Lyshevski, Sergey Edward
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Nano- and Micro-Electromechanical Systems builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book includes homework problems, examples, and a further reading section ...

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Nano- And Micro-Electromechanical Systems: Fundamentals of Nano- And Microengineering, Second Edition 2005, CRC Press, Oxford

ISBN-13: 9780849328381

2nd edition

Hardcover

Nano- And Micro-Electromechanical Systems: Fundamentals of Nano- And Microengineering, Second Edition 2000, CRC Press, Boca Raton, FL

ISBN-13: 9780849309168

Hardcover