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Moems - Motamedi, M Edward
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This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and ...

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Moems 2005, SPIE-International Society for Optical Engineering

ISBN-13: 9780819450210

UK edition

Hardcover