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Micromachining Techniques and Applications

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Micromachining Techniques and Applications - Dunham, Holly (Editor)
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The extensive techniques and applications of micromachining are elucidated in this profound book. Micromachining is used to fabricate 3D microstructures and it is the base of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are the two most essential categories in this field. This book discusses the latest developments in micromachining technology. It offers reviews on diverse techniques and methods of micro/nano fabrications such as laser ablation, focused ion ...

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Micromachining Techniques and Applications 2015, NY Research Press

ISBN-13: 9781632383266

Hardcover