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This textbook to provides a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. It takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.

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Micromachined Transducers Sourcebook 2000, McGraw-Hill Inc.,US, New York

ISBN-13: 9780071164627

Paperback

Micromachined Transducers Sourcebook 1998, McGraw-Hill Science/Engineering/Math, Boston, MA

ISBN-13: 9780072907223

Hardcover