Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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