Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials." Read More

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials." Read Less

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  	This is a digital edition of this title. Rent eBook (2 Options) 180 Day Rental: $178.75 (Expires Jan 02, 2025) 365 Day Rental: $211.25 (Expires Jul 06, 2025) Buy eBook Lifetime Access: $325.00 Title: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology by Saburo Nonogaki; Ueno Takumi; Toshio Ito Publisher: Taylor & Francis Print ISBN: 9780824799519, 0824799518 eText ISBN: 9781482273762 Edition: 1998 1st edition Format: PDF eBook	$178.75 Rent eBook This is a digital eBook Nothing will be shipped to you Works with web browsers and the VitalSource app on all Windows, Mac, Chromebook, Kindle Fire, iOS, and Android devices Most eBooks are returnable within 14 days of purchase Questions? See our eBook FAQ