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Micro and Nanoscale Systems: Volume 1659: Novel Materials, Structures and Devices

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Micro and Nanoscale Systems: Volume 1659: Novel Materials, Structures and Devices - Boeckl, John J. (Editor), and Candler, Robert N. (Editor), and DelRio, Frank W. (Editor)
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Symposium XX, 'Microelectromechanical Systems - Materials and Devices', held from December 2 to December 4, 2013, at the MRS fall meeting, explored the fabrication, integration, characterization, and application of small-scale electro-mechanical, thermal, magnetic, fluidic, and optical sensors and actuators. Symposium SS, 'Nanowires and Nanotubes - Novel Materials, Advanced Heterostructures, Doping and Devices', was held from December 1 to December 6, 2013, at the MRS fall meeting, and explored the synthesis and properties ...

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Micro and Nanoscale Systems: Volume 1659: Novel Materials, Structures and Devices 2014, Materials Research Society

ISBN-13: 9781605116365

Hardcover