Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of ...
Read More
Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an important step in the development of integrated circuits.
Read Less
Add this copy of Micro-and Nanopatterning Polymers (Acs Symposium Series to cart. $35.87, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Newport Coast, CA, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers (\Vol. 706) (Acs to cart. $11.25, very good condition, Sold by Dorley House Books rated 5.0 out of 5 stars, ships from Hagerstown, MD, UNITED STATES, published 1988 by American Chemical Society Publication.
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Charts, Graphs, Diagrams. Very Good. No Jacket as Issued. 8vo. First Edition, First Printing; glossy c; publisher's mark on bottom edge; title page missing; Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro-and nanopatterning. 386 clean, unmarked pages.