Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of ...
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Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an important step in the development of integrated circuits.
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Add this copy of Micro-and Nanopatterning Polymers (\Vol. 706) (Acs to cart. $7.00, new condition, Sold by bookbooth rated 5.0 out of 5 stars, ships from Berea, OH, UNITED STATES, published 1998 by Oxford University Press, Incorporated.
Add this copy of Micro-and Nanopatterning Polymers (\Vol. 706) (Acs to cart. $22.00, new condition, Sold by bookbooth rated 5.0 out of 5 stars, ships from Berea, OH, UNITED STATES, published 1998 by Oxford University Press, Incorporated.
Add this copy of Micro-and Nanopatterning Polymers to cart. $106.00, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 1998 by American Chemical Society.
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Add this copy of Micro-and Nanopatterning Polymers to cart. $123.61, new condition, Sold by Media Smart rated 3.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 1998 by American Chemical Society ACS.