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Measurement Technology for Micro-Nanometer Devices

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Measurement Technology for Micro-Nanometer Devices - Zhang, Wendong, and Chou, Xiujian, and Shi, Tielin
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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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Measurement Technology for Micro-Nanometer Devices 2016, John Wiley & Sons Inc, New York

ISBN-13: 9781118717967

Hardcover