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Laser Microfabrication: Thin Film Processes and Lithography

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Laser Microfabrication: Thin Film Processes and Lithography - Ehrlich, Daniel J (Editor), and Tsao, Jeffrey Y (Editor)
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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

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Laser Microfabrication: Thin Film Processes and Lithography 1989, Academic Press, Boston, MA

ISBN-13: 9780122334306

Hardcover