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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics - Cristiano, Fuccio (Editor), and La Magna, Antonino (Editor)
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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV ...

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Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics 2021, Woodhead Publishing

ISBN-13: 9780128202555

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