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Introduction to Semiconductor Manufacturing Technology

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Introduction to Semiconductor Manufacturing Technology - Xiao, Hong
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IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a ...

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Introduction to Semiconductor Manufacturing Technology 2012, SPIE Press, Bellingham

ISBN-13: 9781510616530

2nd edition

Paperback

Introduction to Semiconductor Manufacturing Technology 2001, Pearson, Upper Saddle River

ISBN-13: 9780130224040

Hardcover