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Introduction to Miroelectromechanical 2 - Maluf, Nadim, and Williams, Kirt
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MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage ...

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Introduction to Miroelectromechanical 2 2004, Artech House Publishers, Boston, MA

ISBN-13: 9781580535908

2nd Revised edition

Hardcover