Recent advances in techniques to characterize thin films in-situ during deposition could lead to an improved understanding of deposition processes and to better, faster, diagnosis of issues with the deposition process. This book provides a comprehensive review of this increasingly important topic, focusing on the techniques and concepts.
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Recent advances in techniques to characterize thin films in-situ during deposition could lead to an improved understanding of deposition processes and to better, faster, diagnosis of issues with the deposition process. This book provides a comprehensive review of this increasingly important topic, focusing on the techniques and concepts.
Read Less
