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Handbook of Physical Vapor Deposition (PVD) Processing

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Handbook of Physical Vapor Deposition (Pvd) Processing - Mattox, Donald M
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Covering all aspects of PVD process technology, from the characterization and preparation of the substrate material to post deposition processing. This volume emphasizes the aspects of process flow critical to economical deposition of films that can meet the required performance specifications.

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Handbook of Physical Vapor Deposition (PVD) Processing 2010, William Andrew

ISBN-13: 9780815520375

2nd edition

Hardcover

Handbook of Physical Vapor Deposition (Pvd) Processing 2007, William Andrew

ISBN-13: 9780815514220

Hardcover