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Electrochemical Micromachining for Nanofabrication, Mems and Nanotechnology

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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology - Bhattacharyya, Bijoy
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying ...

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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology 2015, William Andrew Publishing, Norwich

ISBN-13: 9780323327374

Hardcover