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Contamination-Free Manufacturing for Semiconductors and Other Precision Products

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Contamination-Free Manufacturing for Semiconductors and Other Precision Products - Donovan, Robert P
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This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).

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Contamination-Free Manufacturing for Semiconductors and Other Precision Products 2001, CRC Press, Oxford

ISBN-13: 9780824703806

Hardcover