This work presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries ...
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This work presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.
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Add this copy of Low-Energy Ion Irradiation of Solid Surfaces to cart. $88.04, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 1998 by Springer.
Add this copy of Low-Energy Ion Irradiation of Solid Surfaces to cart. $96.58, new condition, Sold by Media Smart rated 4.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 1998 by Springer.
Add this copy of Low-Energy Ion Irradiation of Solid Surfaces.; to cart. $125.00, very good condition, Sold by J. Hood, Booksellers, Inc. rated 5.0 out of 5 stars, ships from Baldwin City, KS, UNITED STATES, published 1999 by Springer Verlag.
